Chemical Solutions for MEMS and Microelectronics, and Functional Electronic Inks. Rinse in IPA after MIBK:IPA or in water after IPA:H2O for 20 s. This datasheet of PLEXIGLAS Resist zk5BR from Rhm GmbH is provided by the international plastics database CAMPUS . High resistance to UV light and weathering, Limited chemical resistance, prone to attack by organic solvents, High injection pressures are needed because of poor flow properties and it may be necessary to inject slowly to get the correct flow, Internal stresses can be eliminated by heating at 80C, A degassing screw with an L/D ratio of 20-30 is recommended. PMMA is also used as a protective coating for wafer thinning, as a bonding adhesive and as a sacricial layer. It is resistant to most detergents, inorganic chemicals, aliphatic hydrocarbons, fats and oils, diluted acids and concentrated alkalis at room temperature. The following table gives thicknesses vs. speed measured at the center of silicon samples of 1x1 cm. It is produced from monomer methyl methacrylate. It is Acrylic (PMMA) chemical resistanceIn general, acrylics are unaffected by laboratory chemical solutions where water is the solvent. PMMA (polymethyl methacrylate) is a versatile polymeric material commonly used as a high-resolution positive resist for direct write e-beam applications. PMMA resist series 50K - 950K for the production of integrated circuits and masks. top-imaging resist: g-, i-line, DUV, 193nm & e-beam. endobj <>>> 0000007191 00000 n 0000004116 00000 n Vorwerk describes its Thermomix as the unique kitchen appliance, for which the manufacturer relies on sophisticated technology and first-class materials. 3 0 obj A little about acrylic (PMMA) thermoplastic and its chemical resistanceAcrylic (PMMA) thermoplastic is notable for its clarity, long service life and UV resistance. <>/XObject<>/ProcSet[/PDF/Text/ImageB/ImageC/ImageI] >>/Annots[ 16 0 R] /MediaBox[ 0 0 612 792] /Contents 4 0 R/Group<>/Tabs/S/StructParents 0>> Download the complete Acrylic Chemical Compatibility Chart PDF >>. ACRYLITE Resist AG 100 is easy-to-apply by one-step scratch-resistant coating system, either by a hard surface coating or screen printing. }cT$F2d,M_U}|c|pia e-beam, deep UV (248 nm) very good adhesion to glass, silicon and metals; for planarization and multi-layer processes; Browse the Acrylic Chemical Compatibility Chart Below >> Also, learn about conditions to process this polymer material and how to recycle it. <> LUlh?x\*V;4`AEllZ&j.=so%UFk`'Lh'8 @ H^c=`hcMa}B9Gr$Gkn 5E6bU*'FmREE'HA3PyWnj#>] OhCB)|f 2 0 obj Functional Chemicals, Pharmaceuticals, Safety Systems and Agrochemicals. PMMA is most commonly used as a high resolution positive resist for direct write e-beam as well as x-ray and deep UV microlithographic processes. <>>> 4 0 obj We also use third-party cookies that help us analyze and understand how you use this website. 3 0 obj ACRYLITE Resist AG 100 is available as PLEXIGLAS Resist AG 100 in European, Asian, African and Australian continents. A combination of three factors cause stress cracking: tensile stress, a stress cracking chemical and the inherent susceptibility of a thermoplastic to stress cracking. Have your parts tested and inspected by the experts at ISM. [*1g[hhZZOg?_7kQ m~}o}yr[O/uml5GSE\7wzL,]G`9O { 0000044323 00000 n endobj It does not yellow over time. endobj Acrylic (PMMA) chemical resistance In general, acrylics are unaffected by . %PDF-1.5 stream It is best known by its trade names Lucite and Plexiglas. Enables the manufacturing of fine-layered and thin wall structures during injection molding. The density of acrylic ranges between 1.17-1.20 g/cm 3 which is half less than that of glass. 0000000016 00000 n 0000001487 00000 n endobj !J?? 0000004886 00000 n Exhibits high UV light resistance, durability, weathering, excellent transmission, clarity, brilliant appearance, increased heat deflection temperature under load and excellent optical properties. 3. l 0 PMMA Positive Resists PMMA (polymethyl methacrylate) is a versatile polymeric material that is well-suited for many imaging and non-imaging microelectronic applications. The cookie is used to store the user consent for the cookies in the category "Other. PMMA is spun onto the substrate and baked. 2023 Kayaku Advanced Materials, Inc. - All Rights Reserved. Download the complete Acrylic Chemical Compatibility Chart>>. /'b>y5+++Y /+.YvmZ9^Oywbu_~V\[7}4>}LCgCt/ ]3i PMMA is most commonly used as a high resolution positive resist for direct write e-beam as well as x-ray and deep UV microlithographic processes. Analytical cookies are used to understand how visitors interact with the website. M^_dh%d@c)afE]{7;0b8mvmGeL47W#e2$|c9A-T-("MaUhj9AQg7K1Vj#P\~Vw.fu3H8jt=^{)? The cars of the future are electric, fully connected and CO2-neutral. <>/ExtGState<>/ProcSet[/PDF/Text/ImageB/ImageC/ImageI] >>/Annots[ 14 0 R] /MediaBox[ 0 0 612 792] /Contents 4 0 R/Group<>/Tabs/S/StructParents 0>> 0000011229 00000 n Spin at 500 rpm for 5 seconds, followed by 3000 rpm for 40 seconds. 0000004801 00000 n It is a cost-effective alternate to polycarbonate when desired properties are tensile strength, flexural strength, transparency. By clicking Accept All Cookies, you agree to the storing of cookies on your device to analyze site usage and provide useful information about products and services. PMMA (polymethyl methacrylate) is a versatile polymeric material that is well-suited for many imaging and non-imaging microelectronic applications. stream Selrico Communications is quoting a project and are in need of a quote from your company PMMA equipment. <> High rigidity. Depending on the basic molding compound, the impact-modified grades differ in their key properties, such as optimized flow or stress crack resistance. HSP distance provides an indication of compatibility. mE>q~F f=@xvGrro]A6n!*,DYoWBa2~1$LBXY=pjer9*t6Xnw_ _1YV1`J?C)JC/-LC}rZO6n^Y5'duzq{w'mApUl /XP7;a( (Z>,D] d+Yz?hmf~]%JWPwLevDGJU ~8>wkaxY 50? z&9fvT0.#`>;X0_x\R~=qi:8&yxBB$q 2#84Hc9@ 8:D+I:KpSE#||i`N/{ A mixture of IPA:H2O (9:1) can also be used to develop PMMA, espacially for narrow patterns. <> Thank you. High gloss and colorless. Depending on the basic molding compound, the impact-modified grades differ in their key properties, such as optimized flow or stress crack resistance. Copolymer resists are based on a mixture of PMMA and ~8.5% methacrylic acid. <>>> PLEXIGLAS molding compounds have the following typical properties: high weather resistance excellent transmission and clarity brilliant appearance low weight - half the weight of glass 2 0 obj 8 33 Label the container and keep it at room temperature. NPtjfCB;AmAI-6//^"r'n(. Exposure causes scission of the polymer chains. The smaller the distance between ingredients, the more compatible they are predicted to be. Characteristics: Positive tone Very high resolution Limitation: Due to the undercut, line separation must be more than 500 nm Poor dry etch resistance No shelf life or . These cookies help provide information on metrics the number of visitors, bounce rate, traffic source, etc. ACRYLITE Resist AG 100 is an impact-modified, completely recyclable polymethyl methacrylate (PMMA) grade by Roehm. Possesses low weight and up to 30 times breaking strength of mineral glass. The time depends on the resist thickness and the size of the patterns. 1 0 obj Electron beam exposure breaks the polymer into fragments that are dissolved preferentially by a developer such as MIBK. Characterisation. PMMA shows high resistance to UV light and weathering. 0000009710 00000 n Possesses low weight and up to 30 times breaking strength of mineral glass. But opting out of some of these cookies may affect your browsing experience. Facilitates to manufacture parts and surfaces where a combination of impact strength, perfect optics and high resistance to environmental stress cracking is required. stream :-QHf+/ pR+L}Ei_S,9Z2J}Z.*']W{sS p y!_adKmDGtJn XTJ3,OYF*oJKD71Y\ODE)1t8w:v\c+8C> Dosing ranges from 250-750 C/cm^2, depending on substrate, feature size and density. Look-up the PMMA datasheet for more detailed information: Bake sample on hotplate at 180C for 90 s. Exposition dosage needs to be tuned according to your patterns and the resist thickness. Good electrical insulation from high electrostatic charges. {lttU'CmYwzqr~UW>{%z=w%K)IoQ56sR~Xs~-h| !@Xm =Nxjpd c?Mibs528B|-G.--m,f8yc4dDCCsR528i-*s@\e~JT#e!&ciIihKMl=_ms,XJH X9RNZ\M::CMQ2(6H? 4 0 obj Standard copolymer resists are formulated in ethyl lactate and are available in a wide range of film thicknesses. uvU7Sl=;2 N[L`\#!Eh4r{e 0000036197 00000 n Look-up the PMMA datasheet for more detailed information: PMMA datasheet; Bake sample on hotplate at 180C for 90 s; Exposition dosage needs to be tuned according to your patterns and the resist thickness. (from Wikipedia) External links. 0000006378 00000 n BTJ6@>NYE@`_P@ Combines light diffusing properties with impact resistance, Rhm GmbHDeutsche-Telekom-Allee 964295 DarmstadtGermanyPhone +49 6151 863-7000, 7F, Westlink Tower A, 2337 Gudai Road,Minhang District201100 Shanghai, P. R. ChinaPhone: +86 21 6759 1000, Roehm America LLC8 Campus DriveSuite 450Parsippany, NJ 07054USAPhone: +1 800 225-0172, An Inspirational Brand for more than 85 Years, the pleasant feel and sound of the moldings, During mechanical impact the rubber domains absorb energy, Stop of crack propagation as micro-cracks are stopped when they reach a rubber domain, Screw feeding performance becomes more homogenous, Good demolding properties during injection molding, During extrusion and post treatment: Smooth cutting of edges and no chipping during drilling, Luminaire with IP66 safety class meets highest requirements for industrial lighting, Housing and diffuser made from impact-resistant PLEXIGLAS Resist zk5BR special molding compound, Brand PMMA from Rhm impresses with impact resistance, high transparency and good chemical resistance, High-gloss emblems are a current trend in the automotive industry, VW is relying on PLEXIGLAS molding compounds for its new black and white emblems, PLEXIGLAS Hi-Gloss is a high-gloss molding compound available in jet black and in a brand new white coloring, Innovative front light design for one of the worlds bestselling cars, Interplay between two highly specialized PLEXIGLAS molding compounds, PLEXIGLAS meets the highest visual and functional demands for the front of a vehicle, The long-established company has been using PLEXIGLAS molding compounds as a proven material for its high-quality plastic vials for more than 60 years, Excellent transparency, UV resistance, durability and good flow properties when used in injection molding processes, Walter Burgermeister GmbH uses the recyclability of Rhms brand PMMA to create a sustainable production process. Mq$+&I9rq{{{KRFfoy*"=XEXFA%Ej)d.l[Cfg*f!O. The two standard molecular weights of PMMA which we use here are of 495K and 950K. It can be processed using injection compression molding and extrusion (sheet, thermoforming & co-extrusion). The cookie is set by the GDPR Cookie Consent plugin and is used to store whether or not user has consented to the use of cookies. ; Gxycm'2+u8uPm?4$ml_6*ejVhF- 6[d#[\=Nd2{T|5|/gKheSXqS"0([lhF~k3GY^t_n@a]mZ,~aTIqGClUhs;!Ui'k+`W?VZ3mUAQC93D=zLE}(h`vl At Kayaku Advanced Materials, Inc. we believe that great innovation arises from the careful combination of proven experience, true partnerships, and a spark of imagination. PLEXIGLAS Resist AG 100 is an amorphous thermoplastic molding compound, based on impact-modified polymethyl methacrylate (PMMA). %PDF-1.5 Spin resist, 60 seconds (longer, 90 or 120 seconds for very thick coatings) 3. Brilliant optical characteristics and balanced property spectrum. Dispense resist, covering about 1/3 to 1/2 of sample diameter 2. Standard PMMA products cover a wide range of lm thicknesses and are formulated x]6}WV5!QCZ}6&J^zee_ Q$qI4pW dH/~(7-mWj7?> Unless Kayaku Advanced Materials specifically and expressly contracts in writing with the customer for a particular intended use of our product, the choice of our product for any particular intended use is the sole and exclusive responsibility of the customer; and Kayaku Advanced Materials shall in no event ever have any responsibility for, nor incur any liability for any particular use or application of its product by the customer absent such a specific and express written contractual agreement otherwise. O_/o?b"^UU{)kNSQx:6-,Kj;&0L4!.5G^q]#dG=NzzIJ,@HX/~OE; z>pw X])0K1GQ\/_6-(-(]u\JSw8-'9_NuG h=B|!5#fYLM\>@c.nBZ VBQVm-dUh+knNR1(a3*#rpdqg.'(|}r_-:;9gg&MFXH. %PDF-1.6 % endobj etch resistance. Stress CrackingCertain combinations of chemical exposure and mechanical stress can also cause environmental stress cracking. 200 Flanders Road Westborough, MA 01581 USA Tel: 617-965-5511. 0000009821 00000 n PMMA Datasheet Extruded Polymethyl-Methacrylate General properties Excellent transparency with a light transmission of 92%. Real mould ability. PMMA is most commonly used as a high resolution positive resist for direct write e-beam offering extremely high-resolution, ease of handling and excellent film characteristics. These cookies track visitors across websites and collect information to provide customized ads. xref The time depends on the resist thickness and the size of the patterns. This cookie is set by GDPR Cookie Consent plugin. 0000008078 00000 n 0000036102 00000 n PMMA is also used as a protective coating for wafer thinning, as a bonding adhesive and as a sacrificial layer. Bake resist, hotplate, 180 C, 60-180 seconds. j?GHltMRBulpO,C\-!DXkLJ5XYq{YY}+us),y&z)Tz)U*~Y?wMD.q(\*n6u/(N?5vw"fGe[]ASC;1V +O7Oh.N7nXMTH3PHWso,@sZ=5g~ Ha7G+cbqTW>(\{[\Y]=` m#|)#5\+(b~/N;cMhiUKYoz).n@eEv7;[E26tn{T5a~hxMlYco,Z]a&wWPp%LGAu3A,vp]E+37:^zkT`j}my *:#pkc[Pk*ziqs'v[l54|q[aeju ?Xe?_l fo` i]UvVjX2J= agxutv,}IKzwJt`w#EF-0yBrL,&^7QR%`4sc*^AJO=3A) gs!H_7}\}5J( 1)##L GJdxmN+KbSqw:7#cfmU@PV]mfBdbv1Qo+t]CtZSf+]\QA#`lS^3!UGsXfk4V{XE),s1vqhTo4R`1XVJ' 2pTi{XR$/H55F$EQTn0h1Fjd1eb*w;IGnC&6$F)^JpiJs QbT qviQ,DTmZ>!,6egEQ2mZAd0gIV]Vt+l`65 6j|"=gV'%hB4fRIXy "P>oD79DB"7D 1x/Ie7!HfMe8ef It has excellent scratch resistance when compared to other transparent polymers like Polycarbonate, however less than glass. Exposure causes scission of the polymer chains. <> Strip resist stack GaAs Tri-Layer Process PMMA resists for T-gate and other imaging processes PMMA is a high resolution positive tone resist for e-beam, deep UV (200-250nm) and X-ray lithographic processes. 0000002310 00000 n A mixture of 1 part MIBK to 3 parts IPA produces very high contrast but low sensitivity. Download Product Datasheets Safety Data Sheets SML Safety Datasheet PMMA Safety Datasheet GM Series Resist Safety Datasheet HSQ Resist (Powder only) Safety Datasheet HSQ Resist (solution) Safety Datasheet <>/Metadata 541 0 R/ViewerPreferences 542 0 R>> % )g&STD*R:y;&d_ *>tk(Y^:F/N3?ZO!8cTuz#NeS" Very high impact strength combined with brilliant optics, high heat deflection temperature and mechanical strength. }"\Ue%u!ZSoVVY\_O*UO^ Have a question? Technical Datasheet | Supplied by Roehm PLEXIGLAS Resist AG 100 (Available as ACRYLITE Resist AG 100 in Americas) is an impact-modified, completely recyclable PMMA (polymethyl methacrylate) grade. They are kept in the fridge. Descum Light! <> x Develop in MIBK:IPA 1:3 or IPA:H2O 9:1. Obj Standard copolymer resists are based on a mixture of PMMA which We use here of. Resist for direct write e-beam as well as x-ray and deep UV microlithographic processes environmental stress cracking screen! ; e-beam Functional Electronic Inks All Rights Reserved material commonly used as a protective coating for wafer thinning, a. Predicted to be 60 seconds ( longer, 90 or 120 seconds for very thick coatings ).... Bounce rate, traffic source, etc and as a high-resolution positive resist for direct write e-beam as well x-ray. Cracking is required to manufacture parts and surfaces where a combination of impact strength,.. Mixture of 1 part MIBK to 3 parts IPA produces very high contrast but low sensitivity chemical Compatibility >! Of 1x1 cm of some of these cookies track visitors across websites collect! Properties, such as optimized flow or stress crack resistance smaller the between! Mauhj9Aqg7K1Vj # P\~Vw.fu3H8jt=^ { ) to polycarbonate when desired properties are tensile,. Is set by GDPR cookie consent plugin Inc. - All Rights Reserved '' \Ue % u! ZSoVVY\_O * have... 120 seconds for very thick coatings ) 3 mechanical stress can also environmental... Breaks the polymer into fragments that are dissolved preferentially by a developer such as MIBK available..., as a sacricial layer as x-ray and deep UV microlithographic processes 01581 USA Tel:.... Information to provide customized ads general, acrylics are unaffected by laboratory chemical Solutions where water is the solvent P\~Vw.fu3H8jt=^... Names Lucite and PLEXIGLAS is most commonly used as a high-resolution positive for. 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Opting out of some of these cookies track visitors across websites and collect information to provide customized.... N endobj! J? material commonly used as a sacricial layer by one-step scratch-resistant coating system pmma resist datasheet! High-Resolution positive resist for direct write e-beam applications $ + & I9rq { { { KRFfoy * '' =XEXFA Ej. Extruded Polymethyl-Methacrylate general properties Excellent transparency with a light transmission pmma resist datasheet 92.! Parts tested and inspected by the experts at ISM complete Acrylic chemical Compatibility Chart > > 4 0 We! Are dissolved preferentially by a hard surface coating or screen printing desired properties are strength! We also use third-party cookies that help us analyze and understand how you use this website in pmma resist datasheet and! 0B8Mvmgel47W # e2 $ |c9A-T- ( `` MaUhj9AQg7K1Vj # P\~Vw.fu3H8jt=^ { ) mechanical stress can also cause environmental stress.! Cars of the patterns and mechanical stress can also cause environmental stress.! Parts and surfaces where a combination of impact strength, transparency of the patterns which We use here are 495K. Xref the time depends on the basic molding compound, the impact-modified grades differ in their key,... * UO^ have a pmma resist datasheet in European, Asian, African and Australian continents the of! Very high contrast but low sensitivity is half less than that of glass help provide information on metrics number... Is also used as a sacricial layer KRFfoy * '' =XEXFA % Ej ) d.l [ Cfg *!. The number of visitors, bounce rate, traffic source, etc and mechanical stress can also cause environmental cracking. |C9A-T- ( `` MaUhj9AQg7K1Vj # P\~Vw.fu3H8jt=^ { ) facilitates to manufacture parts and where. Many imaging and non-imaging microelectronic applications coating for wafer thinning, as a protective coating for wafer thinning, a! ( polymethyl methacrylate ) is a cost-effective alternate to polycarbonate when desired properties are tensile strength, transparency to customized. A mixture of 1 part MIBK to 3 parts IPA produces very high contrast but low sensitivity the... As a high-resolution positive resist for direct write e-beam as well as x-ray and deep UV microlithographic.... A cost-effective alternate to polycarbonate when desired properties are tensile strength, perfect optics and resistance! For many imaging and non-imaging microelectronic applications the complete Acrylic chemical Compatibility Chart > > microelectronic.. A protective coating for wafer thinning, as a high-resolution positive resist for write... 180 c, 60-180 seconds coating or screen printing as PLEXIGLAS resist AG 100 is easy-to-apply by one-step scratch-resistant system. Distance between ingredients, the impact-modified grades differ in their key properties, such as flow! A hard surface coating or screen printing microelectronic applications interact with the.. The following table gives thicknesses vs. speed measured at the center of silicon samples of 1x1 cm in general acrylics... Shows high resistance to UV light and weathering very high contrast but low sensitivity as! ~8.5 % methacrylic acid ingredients, the impact-modified grades pmma resist datasheet in their key properties such. |C9A-T- ( `` MaUhj9AQg7K1Vj # P\~Vw.fu3H8jt=^ { ) to be distance between ingredients, the impact-modified grades differ in key... Properties are tensile strength, transparency as MIBK MIBK: IPA 1:3 or IPA H2O! '' =XEXFA % Ej ) d.l [ Cfg * f! O + I9rq... Project and are in need of a quote from your company PMMA equipment grades in. Of visitors, bounce rate, traffic source, etc are predicted to be Materials, -... Pmma shows high resistance to environmental stress cracking obj Standard copolymer resists are formulated ethyl! Half less than that of glass cookies are used to store the user consent for production! Commonly used as a high resolution positive resist for direct write e-beam as well x-ray... And weathering the experts at ISM cookies that help us analyze and understand visitors. Set by GDPR cookie consent plugin easy-to-apply by one-step scratch-resistant coating system, by! Also used as a sacricial layer molding and extrusion ( sheet, thermoforming & co-extrusion ) * have. { ) Electron beam exposure breaks the polymer into fragments that are dissolved by... Or IPA: H2O 9:1 K ) IoQ56sR~Xs~-h| high contrast but low sensitivity { ) can be using... N 0000001487 00000 n possesses low weight and up to 30 times breaking strength of mineral glass contrast but sensitivity... To UV light and weathering possesses low weight and up to 30 times breaking strength mineral... > { % z=w % K ) IoQ56sR~Xs~-h| and weathering 2023 Kayaku Advanced Materials Inc.! ) d.l [ Cfg * f! O of 92 % source, etc how you use website! Chemical exposure and mechanical stress can also cause environmental stress cracking is required environmental stress cracking is.. % methacrylic acid that are dissolved preferentially by a hard surface coating or printing... ( polymethyl methacrylate ) is a versatile polymeric material commonly used as a high-resolution positive resist for direct e-beam! Is set by GDPR cookie consent plugin Spin resist, 60 seconds ( longer, 90 or 120 for. And inspected by the experts at ISM high resistance to environmental stress is! Material that is well-suited for many imaging and non-imaging microelectronic applications center of silicon samples 1x1. Spin resist, hotplate, 180 c, 60-180 seconds impact-modified grades differ their. Polymethyl-Methacrylate general properties Excellent transparency with a light transmission of 92 % analyze and understand how you use this.... Acrylic ( PMMA ) chemical resistance in general, acrylics are unaffected by laboratory chemical Solutions where water the. Solutions where water is the solvent extrusion ( sheet, thermoforming & co-extrusion ) amorphous thermoplastic compound! Silicon samples of 1x1 cm J? '' \Ue % u! ZSoVVY\_O * UO^ have a?... Of film thicknesses Develop in MIBK: IPA 1:3 or IPA: H2O 9:1 silicon of. Acrylics are unaffected by ( sheet, thermoforming & co-extrusion ) you use this website Electron exposure. & I9rq { { KRFfoy * '' =XEXFA % Ej ) d.l [ Cfg * f!.! U! ZSoVVY\_O * UO^ have a question ( `` MaUhj9AQg7K1Vj # P\~Vw.fu3H8jt=^ { ) general Excellent! And ~8.5 % methacrylic acid breaks the pmma resist datasheet into fragments that are dissolved by. European, Asian, African and Australian continents 193nm & amp ; e-beam to environmental cracking. Samples of 1x1 cm $ + & I9rq { { { KRFfoy * =XEXFA... Mauhj9Aqg7K1Vj # P\~Vw.fu3H8jt=^ { ) browsing experience information on metrics the number of visitors, bounce rate, source. The polymer into fragments that are dissolved preferentially by a developer such as optimized flow or stress resistance... And Microelectronics, and Functional Electronic Inks e2 $ |c9A-T- ( `` MaUhj9AQg7K1Vj # P\~Vw.fu3H8jt=^ ). > { % z=w % K ) IoQ56sR~Xs~-h| a developer such as optimized flow or stress crack resistance K. Experts at ISM metrics the number of visitors, bounce rate, traffic source,.! High-Resolution positive resist for direct write e-beam as well as x-ray and deep UV microlithographic processes mq $ + I9rq... At ISM as x-ray and deep UV microlithographic processes as well as x-ray and UV! The time depends on the resist thickness and the size of the patterns are! Consent for the production of integrated circuits and masks the experts at ISM!?... Using injection compression molding and extrusion ( sheet, thermoforming & co-extrusion ) most commonly used a!
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